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Hydrogen Peroxide Vapours Sensors Made From ZnO<La> and SnO2<Co> Films

Authors:
Vladimir Aroutiounian
Valeri Arakelyan
Mikael Aleksanyan
Artak Sayunts
Gohar Shahnazaryan
Petr Kacer
Pavel Picha
Jiri Kovarik
Jakub Pekarek
Berndt Joost

Keywords: sensor; hydrogen peroxide vapours; semiconductor; metal oxide; thin film

Abstract:
Thin film hydrogen peroxide vapours sensors made from ZnO<La> and SnO2<Co> were manufactured by the high-frequency magnetron sputtering method. Response of the prepared sensors was investigated at different concentrations of hydrogen peroxide vapours and temperatures of the sensor work body. It was found that the La-doped ZnO sensors exhibit a sufficient response at 10 ppm of hydrogen peroxide vapours at the operating temperature of 220 °C. Good response to 100 ppm of hydrogen peroxide vapours at the work body temperature of 150 °C was shown for Co-doped SnO2 sensors.

Pages: 36 to 38

Copyright: Copyright (c) IARIA, 2017

Publication date: March 19, 2017

Published in: conference

ISSN: 2519-836X

ISBN: 978-1-61208-543-2

Location: Nice, France

Dates: from March 19, 2017 to March 23, 2017