Home // ALLSENSORS 2017, The Second International Conference on Advances in Sensors, Actuators, Metering and Sensing // View article

Comparaison between MOX Sensors for Low VOCs Concentrations with Interfering Gases

Authors:
Frank James
Tomas Fiorido
Marc Bendahan
Khalifa Aguir

Keywords: gas sensor; reactive RF sputtering ; isobutylene; carbon dioxyde; carbone monoxyde; tin oxide; zinc oxide; tungsten oxide.

Abstract:
N-type Metal Oxide (MOX) sensors was developed to detect Volatil Organic Compounds (VOCs) at low concentration level. Sensitive layer like SnO2, ZnO and WO3 was deposited by reactive RF sputtering method. The sensors consist of Ti/Pt interdigitaded electrodes and a MOX sensitive layer on a silicon substrate. Gas sensing properties have been investigated toward isobutylene, which a good example of typical VOC. The optimum working temperature set with a hotplate, was experimentally determinated at 285°C for isobutylene. This work highlights the detection by MOX sensor of VOC with interfering gas. This sensor will be used for a real time indoor air monitoring.

Pages: 39 to 40

Copyright: Copyright (c) IARIA, 2017

Publication date: March 19, 2017

Published in: conference

ISSN: 2519-836X

ISBN: 978-1-61208-543-2

Location: Nice, France

Dates: from March 19, 2017 to March 23, 2017