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Humidity Impact Reduction on WO3 Gas Microsensor Response Using New Filters Based on Ionic Liquid

Authors:
Alexandre Favard
Jean-Luc Seguin
Khalifa Aguir
Xueru Yan
Stéphane Anguille
Philippe Moulin
Marc Bendahan

Keywords: gas sensor; humidity removal; tungsten trioxide; ionic liquid based filter

Abstract:
The detection of gaseous pollutants such as Benzene, Toluene, Ethylbenzene and Xylene (BTEX) under real conditions requires working in a humid environment. It is well known that the humidity reduces the performances of gas sensors, particularly in terms of sensitivity. Using a filter based on an ionic liquid (IL), low concentrations of BTEX can be detected with a tungsten trioxide (WO3) thin film (50 nm) deposited by reactive radio frequency (RF) magnetron sputtering on a transducer which has developed in IM2NP laboratory. With this absorption upstream, we are able to detect 500 ppb of BTEX gases without a sensor sensitivity decrease with 50% relative humidity in the inlet feed.

Pages: 35 to 37

Copyright: Copyright (c) IARIA, 2018

Publication date: March 25, 2018

Published in: conference

ISSN: 2519-836X

ISBN: 978-1-61208-621-7

Location: Rome, Italy

Dates: from March 25, 2018 to March 29, 2018