Home // ALLSENSORS 2018, The Third International Conference on Advances in Sensors, Actuators, Metering and Sensing // View article

Design and Fabrication of a Solid-State pH Sensor Module - Considering Its Possible Applications

Authors:
Lan Zhang
Jian Lu
Ryutaro Maeda
Hirofumi Nogami

Keywords: pH value test; solid state; MEMS sensor; Indium Tin Oxide

Abstract:
We developed a solid pH sensor, which can implement a real-time monitoring of pH value with low power consumption and high accuracy. The prototype of the pH sensor was fabricated and packaged well and can keep a linear output proportional to the changes in the pH value and has a high-sensitivity of >14 µA/pH. The developed pH sensor is believed significant important for industrial and civilian as well as for improving the efficiency of environment monitoring.

Pages: 101 to 102

Copyright: Copyright (c) IARIA, 2018

Publication date: March 25, 2018

Published in: conference

ISSN: 2519-836X

ISBN: 978-1-61208-621-7

Location: Rome, Italy

Dates: from March 25, 2018 to March 29, 2018