Home // ALLSENSORS 2019, The Fourth International Conference on Advances in Sensors, Actuators, Metering and Sensing // View article

Research on the Performance of Solid-State pH Sensor Affected by the Sensing Materials

Authors:
Lan Zhang
Jian Lu
Ryutaro Maeda
Hirofumi Nogami

Keywords: pH value test; solid state; MEMS process; Metal Oxide

Abstract:
We developed a solid pH sensor, which can implement a real-time monitoring of pH value with low power consumption and high accuracy. In this work, three kinds of different metal oxide materials are used to fabricate the sensing electrode layers. Mechanical and functional properties comparison of electrodes by different material coatings are comprehensively evaluated. As the results shown, the given pH sensor based on SnO2 can keep a linear output proportional to the changes in the pH value and has a higher sensitivity of >530 µV/pH.

Pages: 1 to 2

Copyright: Copyright (c) IARIA, 2019

Publication date: February 24, 2019

Published in: conference

ISSN: 2519-836X

ISBN: 978-1-61208-691-0

Location: Athens, Greece

Dates: from February 24, 2019 to February 28, 2019