Home // ALLSENSORS 2020, The Fifth International Conference on Advances in Sensors, Actuators, Metering and Sensing // View article

Design of an acoustic transducer structure for biosensing

Authors:
Emmanuel Attal
Sophie Sok
Thérèse Leblois

Keywords: Gallium Arsenide; Acoustic transducer; Holes numbers.

Abstract:
In a biomedical context linked to the detection of biological particles in a liquid by a biosensor, we have modeled a piezoelectric transducer based on Gallium Arsenide. The future application will enable to evaluate the mass of biological specific elements present in a complex fluid. The multiphysics simulations of this transducer allowed us to identify a quasi-transverse thickness mode at around 2 MHz. For this mode, the out-of-plane displacement is low, which is a prerequisite to keep the performance when immersed in a liquid medium. In this study, we demonstrated the effect of holes distributed over the structure on the in-plane/out-of-plane displacement ratio and on its resonance frequency.

Pages: 76 to 77

Copyright: Copyright (c) IARIA, 2020

Publication date: March 22, 2020

Published in: conference

ISSN: 2519-836X

ISBN: 978-1-61208-766-5

Location: Valencia, Spain

Dates: from November 21, 2020 to November 21, 2020