Home // ALLSENSORS 2021, The Sixth International Conference on Advances in Sensors, Actuators, Metering and Sensing // View article

Ozone Sensors Based on WO3 Sputtered Layers Enhanced by Ultra Violet Light Illumination

Authors:
Clément Occelli
Sandrine Bernardini
Ludovic Le Roy
Tomas Fiorido
Jean-Luc Seguin
Carine Perrin-Pellegrino

Keywords: UV activation; Electronic traps; Ozone; Environment; Health.

Abstract:
In this work, the conductance behavior of tungsten trioxide based chemoresistive ozone sensors under ultra violet illumination was investigated. The tungsten trioxide sensitive layers were deposited on a SiO2/Si substrate by reactive radio frequency magnetron sputtering with several Argon / Oxygen ratios. The detection principle is based on a change in the conductance of the semiconductor oxides when ozone is present around the surface. We demonstrate the influence of Argon / Oxygen during the deposition of the sensitive layer, on ozone detection at 50°C under light illumination. The sensor shows good sensitivity to ozone, with a stable baseline, fast response and recovery time. These results are promising for the detection of ozone at low temperature.

Pages: 28 to 31

Copyright: Copyright (c) IARIA, 2021

Publication date: July 18, 2021

Published in: conference

ISSN: 2519-836X

ISBN: 978-1-61208-875-4

Location: Nice, France

Dates: from July 18, 2021 to July 22, 2021