Home // ICQNM 2015, The Ninth International Conference on Quantum, Nano/Bio, and Micro Technologies // View article

Clamped-Clamped Microbeam Resonators of Enhanced Higher Order-Modes Response and Wide Bandwidth

Authors:
Nizar Jaber
Abdallah Ramini
Mohammad Younis

Keywords: multifrequency; resonator; higher order modes.

Abstract:
In this study, we present an experimental investigation of electrically actuated clamped-clamped microbeam resonators. The objective is to excite the higher order modes of the microbeams using partial electrodes with shapes that induce strong excitation of the mode of interest. The devices are fabricated using polyimide as a structural layer coated with Nickel from top and Chrome and Gold layers from bottom. Using a high frequency laser Doppler vibrometer, the first three resonance frequencies are revealed via white noise signals. Then, we studied the nonlinear dynamics of the microbeams near these resonance frequencies by applying forward frequency sweep with different electro dynamical loading conditions. The reported results prove the ability to excite higher order modes effectively using partial electrodes. Using a half electrode, the second mode is excited with high amplitude compared with almost zero response using the full electrode. Also, we present an experimental study of an electrically actuated clamped-clamped microbeam under a two-source harmonic excitation. The first frequency is swept around the first and second mode of vibration where the second one is fixed. The excitation of additive and subtractive type resonances is highlighted. In addition, we show that by properly tuning the frequency and the amplitude of the excitation force, the frequency bandwidth of the resonator is increased. Such micro-resonator is shown to be promising in gas and mass detection applications.

Pages: 22 to 28

Copyright: Copyright (c) IARIA, 2015

Publication date: August 23, 2015

Published in: conference

ISSN: 2308-3530

ISBN: 978-1-61208-431-2

Location: Venice, Italy

Dates: from August 23, 2015 to August 28, 2015