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Reduction of Silver Oxide Film in Inert Gas Plasma

Authors:
Victor Ovchinnikov

Keywords: silver oxide; plasma reduction; silver thin film

Abstract:
Reduction of silver oxide in plasma is studied. Silver oxide film was prepared by plasma oxidation of thermally evaporated silver film. It is shown that silver oxide is reduced with different rate in He, Ar and N2 plasmas excited by rf power. To clarify mechanism of reduction, morphology, electrical and optical properties of the samples are analyzed. Spectroscopic ellipsometry is used to measure thicknesses and optical constants of oxidized and reduced layers. It is concluded that the reduction is activated by low energy electron bombardment of silver oxide.

Pages: 6 to 11

Copyright: Copyright (c) IARIA, 2016

Publication date: July 24, 2016

Published in: conference

ISSN: 2308-3530

ISBN: 978-1-61208-495-4

Location: Nice, France

Dates: from July 24, 2016 to July 28, 2016