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Monitoring of Environmental Parameters in Nanoelectronic Fabrication

Authors:
Mokhloss I. Khadem Khadem
Valentin Sgarciu

Keywords: dust sensors; temperature and humidity sensors; wireless network sensors; Mote-VIEW software

Abstract:
Nanoelectronics are the essential hardware enabler for electronic product and service innovation in key growth markets for global industry, such as telecommunications, transportation and medical technology. dust particles, humidity , temperature parameters have big effect for the fabrication area due to the newest technologies that are usually very complex and very sensitive to the external influences. Dust is one of the major problems of the top-down lithographic approaches is that they require very clean environments because dust and particulates can mask part of the exposed area. For high yields and hence low costs, clean rooms must have particulate densities extremely low and at sizes much smaller than the lithographic minimum feature size. In this context, this paper presents a data acquisition system that is capable to monitor and measure three types of environmental parameters: dust, temperature, and humidity. The remote board containing sensors and processing circuits is connected to the server through wireless network. The analogue to digital conversion is realized by data acquisition card (MDA300). The systems can operate for monitoring and control. The sensors communicate wirelessly with selectable sensors via three wireless smart sensors: temperature, dust sensor and humidity sensor. The software control and the acquired data processing are realized with a MOTEVIEW application that is capable to simultaneously display the measured data. This paper introduces a prototype for an affordable wireless sensors network for monitoring air quality. It can work in two modes: online and offline. In online mode, the sensors periodically send the readings to the base station. In offline mode, the sensors store the readings periodically to the internal memory and these readings can be collected whenever they are needed. With minimal changes, the proposed system can be extended to operate with more types of sensors. Using a wireless transmission method between PC and remote board, the operation distance of the system can be further extended. We obtained encouraging results regarding the accuracy of the optical measurements from dust sensors connected in the wireless network

Pages: 345 to 348

Copyright: Copyright (c) IARIA, 2012

Publication date: June 24, 2012

Published in: conference

ISSN: 2308-4219

ISBN: 978-1-61208-203-5

Location: Venice, Italy

Dates: from June 24, 2012 to June 29, 2012