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The Novel Microhotplate: A Design Featuring Ultra High Temperature, Ultra Low Thermal Stress, Low Power Consumption and Small Response Time

Authors:
Hasan Göktaş
Mona Zaghloul

Keywords: Microhotplate; ultra high temperature; ultra-low thermal stress; low power consumption; small thermal response time.

Abstract:
Microhotplate (MHP) has multiple applications, such as micro-heating elements, catalytic gas sensors, resistive gas sensing, infra-red source, non-dispersive infrared detector (NDIR) gas sensing, Fourier transform infrared (FTIR) spectroscopy, temperature sensing, flow sensing, pressure sensing, smart sensing and lab-on-chip. Low power consumption, high temperature, high thermal stability (low thermal stresses), uniform temperature distribution and fast thermal response are the most desirable features of the MHP design. This paper describes the design of the MHP that has ultra-high temperature (2000K), ultra-low thermal stress (90MPa), low power consumption (30mW) and small response time (9.13ms). All the results matched with Coventor simulation results.

Pages: 208 to 212

Copyright: Copyright (c) IARIA, 2013

Publication date: August 25, 2013

Published in: conference

ISSN: 2308-4405

ISBN: 978-1-61208-296-7

Location: Barcelona, Spain

Dates: from August 25, 2013 to August 31, 2013