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MEMS-based Ethanol Sensor Using Zinc Oxide Nanostructured Films

Authors:
Hardik Pandya
Sudhir Chandra
Anoop Vyas

Keywords: Zinc films; Zinc oxide nanocombs; Thermal evaporation; Lithography; Ethanol sensor

Abstract:
An ethanol sensor incorporating nanostructured zinc oxide film and silicon micromachining is reported. A salient feature of the sensor is its lower operating temperature which has been achieved due to the use of nanostructured material as sensing layer. A suitably designed nickel microheater has been integrated with the sensor. The optimum temperature of operation for ethanol sensing was found to be 100 °C, though the sensor could operate at temperature as low as 50 °C with reduced sensitivity. The power consumption, at an operating temperature of 100 °C, was 180 mW while at 50 °C, it is only 90 mW. The sensor is capable of giving detectable response for concentrations of ethanol vapor as low as 10 ppm

Pages: 69 to 74

Copyright: Copyright (c) IARIA, 2011

Publication date: August 21, 2011

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-145-8

Location: Nice/Saint Laurent du Var, France

Dates: from August 21, 2011 to August 27, 2011