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Authors:
Thomas Herzog
Susan Walter
Henning Heuer
Keywords: ultrasonic high frequency sensor; Aluminium nitride thin film
Abstract:
Basic investigations were carried out on the usability of aluminum nitride thin films for the manufacturing of ultrasound transducers. Some design considerations were performed for different sensor designs, electrode sizes and substrate materials in this work. It could be shown that the electrode size can be smaller than 1 mm square for use as high frequency sensors. Different substrate materials are principle usable, like e.g. silicone, aluminum oxide or quartz. Additional tests showed that these sensors can also be used for high temperature application up to 200 °C. The reason is the very good temperature resistance of the AlN thin films. The sensor design was varied for these investigations and simulations based on a MASON model assisted the material considerations.
Pages: 129 to 134
Copyright: Copyright (c) IARIA, 2011
Publication date: August 21, 2011
Published in: conference
ISSN: 2308-3514
ISBN: 978-1-61208-145-8
Location: Nice/Saint Laurent du Var, France
Dates: from August 21, 2011 to August 27, 2011