Home // SENSORDEVICES 2012 , The Third International Conference on Sensor Device Technologies and Applications // View article
Authors:
Sudhir Chandra
Hardik Pandya
Anoop Vyas
Keywords: - Nanostructured ZnO; Thermal evaporation; MEMS Platforms; Methanol sensor
Abstract:
A sensor incorporating nanostructured zinc oxide film on planar and thermally isolated MEMS platform is reported for detecting methanol vapours. An innovative technique for fabricating sensor having integrated microheater with improved mechanical strength is presented. The proposed innovation facilitates the sensor to achieve desired temperature on the chip at lower power. The sensors are capable of detecting methanol vapours at 50 °C and at room temperature (30 °C) with slightly reduced sensitivity. To achieve the operating temperature of 50 °C and 30 °C, the sensor requires only 40 and 20 mW of power respectively. The lower operating temperature has been achieved due to the use of nanostructured material as sensing layer. The sensor is capable of giving detectable response for concentrations of methanol vapor as low as 5 ppm.
Pages: 83 to 88
Copyright: Copyright (c) IARIA, 2012
Publication date: August 19, 2012
Published in: conference
ISSN: 2308-3514
ISBN: 978-1-61208-208-0
Location: Rome, Italy
Dates: from August 19, 2012 to August 24, 2012