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Development of Fast Response Humidity Sensors Based on Carbon Nanotubes

Authors:
Marcos C. Moraes
Elisabete Galeazzo
Henrique E. M. Peres
Francisco J. Ramirez-Fernandez
Michel O. S. Dantas

Keywords: Carbon Nanotubes, Dielectrophoretic Deposition, Humidity Sensors

Abstract:
Current search on miniaturized humidity sensors primarily emphasizes issues related to integration and technological aspects. In this context, research efforts have been focused on developing sensors with Carbon Nanotubes (CNT) because of their promising sensing characteristics. However, there are challenges related to their application in commercial devices such as sensitivity, compatibility, and complexity of miniaturization, among others. In this work, we report the study of the electrical behavior of Multi-Walled Carbon Nanotubes (MWCNT) material deposited between interdigitated electrode structures by means of Dielectrophoresis (DEP), which is a simple and cost-effective method for deposition in micrometric regions. A fast and remarkable increase of electric resistance (up to 2.3 times) was noticed in the tested devices as a function of the concentration of water vapor, thus, these devices play an important and promising role for the development of integrated humidity sensors.

Pages: 7 to 10

Copyright: Copyright (c) IARIA, 2014

Publication date: November 16, 2014

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-375-9

Location: Lisbon, Portugal

Dates: from November 16, 2014 to November 20, 2014