Home // SENSORDEVICES 2014, The Fifth International Conference on Sensor Device Technologies and Applications // View article

Ultrathin Film Hydrogen Sensor with Self-Temperature Compensation

Authors:
Shuzo Takeichi
Yuki Ushita
Ryosuke Sugai
Kenji Sakai
Toshihiko Kiwa
Keiji Tsukada

Keywords: hydrogen sensor; platinum thin film; catalysis

Abstract:
An ultrathin film sensor, consisting of two serially connected Pt/Ti films with different sensitivity to obtain the output voltage, was developed. The hydrogen sensor, based on the electrical resistance change of Pt thin films upon exposure to hydrogen gas, is operable at room temperature. However, two different Pt/Ti films showed different temperature coefficient of resistance, so the output voltage changed by temperature change. In order to solve this problem, we developed a self-temperature compensation technique by 　optimized combination of Pt thickness and Ti thickness. As a result, the hydrogen sensor showed good stability against temperature change.

Pages: 15 to 18

Copyright: Copyright (c) IARIA, 2014

Publication date: November 16, 2014

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-375-9

Location: Lisbon, Portugal

Dates: from November 16, 2014 to November 20, 2014