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Silicon Based Temperature Sensors with Extended Temperature Range and Simple One-point Calibration

Authors:
Ingo Tobehn
Arndt Steinke
Andreas Albrecht
Horst Hansch
Michael Kunze
Thomas Ortlepp

Keywords: component; silicon temperature sensor, one-point calibration, platforms, building blocks, pressure sensor, dew point sensor

Abstract:
Temperature is the most important parameter to be measured in industry, automation, environment and many other fields. Almost any silicon diode can be used as a temperature transducer. Its main advantages are the high precision and the high long-term stability while the drawbacks are the limited operation temperature and the parameter spread due to fabrication uncertainties. We propose a dedicated fabrication technology for silicon-based temperature diodes, specifically designed and optimized to overcome these limitations. It is designed for higher temperature sensing applications where simple calibration, high accuracy and high long-term stability are most important. We demonstrate test results to evaluate the obtained process stability and discuss potential application fields in hybrid multi-sensor systems and more complex feedback-based sensor-actor systems

Pages: 50 to 53

Copyright: Copyright (c) IARIA, 2015

Publication date: August 23, 2015

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-426-8

Location: Venice, Italy

Dates: from August 23, 2015 to August 28, 2015