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Higly Sensitive Pt-TiO2-Pt Sandwich-type Metal Oxide Gas Sensors of Hydrogen

Authors:
Ondrej Krsko
Tomas Plecenik
Azhar ALi Haidry
Pavol Durina
Martin Truchly
Branislav Grancic
Maros Gregor
Tomas Roch
Leonid Satrapinskyy
Marian Mikula
Peter Kus
Andrej Plecenik
Martin Mosko
Antonia Moskova

Keywords: hydrogen gas sensor; metal oxide; high sensitivity; room temperature

Abstract:
Abstract – In this paper, we present a metal oxide-based hydrogen gas sensor with high sensitivity and short response time, operating at room temperature. Our sensors have a sandwich-like structure with a thin metal oxide layer in between the top and bottom electrode. The electrodes are in a shape of long narrow bridges, perpendicular to each other. It has been shown that narrowing the top electrode down to ~100 nm causes the sensitivity to substantially increase and reduces the response time. The sensor response (ratio RAir/RH2) to 1% H2 in synthetic air can be as high as ~105 at room temperature, with response time of only a few seconds. A theoretical model explaining such a behavior is also proposed. The increased sensitivity of sensors with narrow top electrode is explained by non-trivial abrupt change of the charge carrier transport mechanism from thermoemission to electron drift. This change is caused by the hot electron temperature instability induced by combination of the H2 diffusion profile under the top electrode and high intensity of electric field between the electrodes.

Pages: 97 to 98

Copyright: Copyright (c) IARIA, 2015

Publication date: August 23, 2015

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-426-8

Location: Venice, Italy

Dates: from August 23, 2015 to August 28, 2015