Home // SENSORDEVICES 2016, The Seventh International Conference on Sensor Device Technologies and Applications // View article


Surface Acoustic Wave Sensors for Fine Particle Detection

Authors:
Lyes Djoumi
Virginie Blondeau-Patissier
Meddy Vanotti
Etienne Quivet
Daphné Buiron

Keywords: sensors; Love wave; fine particles; air quality.

Abstract:
Surface acoustic wave (SAW) sensors consisting of delay lines built on Quartz are used for fine particle detection. Sensors based on either Rayleigh or Love waves using different guiding layers such as silica and resin were tested. A comparison of these different sensors capabilities has been achieved. Our SAW sensors proved to be able to detect PM10 and PM2.5 particles in the 0 − 100 μg/m 3 concentration range. The influence of the guiding layer thickness on the Love wave sensors sensitivity was also investigated.

Pages: 15 to 16

Copyright: Copyright (c) IARIA, 2016

Publication date: July 24, 2016

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-494-7

Location: Nice, France

Dates: from July 24, 2016 to July 28, 2016