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Design of SiNx Optical Sensor Using Polygonal Resonator Structure

Authors:
Jun-Hee Park
Su-Jin Jeon
Ji-Hoon Kim
Eudum Kim
Sun-Ho Kim
Young-Wan Choi
Kwang Ryong Oh
Chil-Min Kim
Kyung-Jin Choi

Keywords: photonics, optical resonator, optical sensors.

Abstract:
In this paper, SiNx polygonal resonator is carefully simulated for an optical sensor. The polygonal resonator has recently attracted much attention for application in bio and chemical sensors because it does not have a bending loss, which can be fabricated with high integration rate, and it has an advantage of using Multi Mode Interference (MMI) coupler. In polygonal resonator sensor design, high Q-factor and low loss Total Internal Reflection (TIR) mirror are important factors. Therefore, a 125 degrees TIR mirror that has a 97% reflectance considering the Goos-Hånchen shift and critical angle is designed. For rib type waveguide, we designed it to have 3 μm width, 0.5 μm height, and 0.25 μm etching depth. Regarding the simulation results of Finite Domain Time difference (FDTD) method, the Q-factor of SiNx polygonal resonator was 5736 and Free Spectral Range (FSR) was 16.3 nm. When we changed the refractive index, the shift of the peak was 26.5 nm/Refractive Index Unit (RIU).

Pages: 53 to 54

Copyright: Copyright (c) IARIA, 2017

Publication date: September 10, 2017

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-581-4

Location: Rome, Italy

Dates: from September 10, 2017 to September 14, 2017