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Evanescent field sensors based on Si photonics

Authors:
Andreas Tortschanoff
Christian Ranacher
Cristina Consani
Thomas Griller

Keywords: silicon photonics; evanescent field sensor; directional coupler; integrated sensor

Abstract:
We present a detailed study of Si-based optical waveguides, which can be used as evanescent field sensors for the quantitative analysis of various gases and liquids. Waveguides were fabricated and experimentally characterized. Direct quantitative comparison of simulation with experimental results of directional coupling structures allows fine-tuning of the optical material parameters and provides important input for future sensor design. The concept was validated with quantitative CO2 measurements.

Pages: 44 to 47

Copyright: Copyright (c) IARIA, 2018

Publication date: September 16, 2018

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-660-6

Location: Venice, Italy

Dates: from September 16, 2018 to September 20, 2018