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On Wafer Characterisation of the Analog Anisotropic Magnetoresistance Sensor

Authors:
Janez Trontelj ml.

Keywords: analog AMR sensor; wafer sort; AMR sensitivity.

Abstract:
Abstract - This article presents the solution for a fast evaluation tool of an analog integrated Anisotropic Magnetoresistance Sensor (AMR) on a silicon wafer. It was necessary to evaluate a selected prototype development phase of a custom analog AMR sensor. This approach significantly shortened the development time as no dicing and packaging was required. We will also use this solution later for a final volume production wafer sorting. The biggest challenge was to quickly generate and release an accurate, sufficiently strong magnetic field that is as parallel as possible to the wafer surface. Such a field is needed to measure the peak values of the sine and cosine output signals of the analog AMR sensor.

Pages: 80 to 83

Copyright: Copyright (c) IARIA, 2020

Publication date: November 21, 2020

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-820-4

Location: Valencia, Spain

Dates: from November 21, 2020 to November 25, 2020