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Dynamic Mode AFM Measurement of CMUT Diaphragm Deflection Profile

Authors:
Sazzadur Chowdhury

Keywords: CMUT; SOI; AFM; Dynamic mode; Residual stress

Abstract:
Atomic Force Microscopy (AFM) measurement results of the deflection shape and ISO 25178 roughness parameters of the diaphragm of an adhesive wafer bonded Silicon-on-Insulator (SOI) based Capacitive Micromachined Ultrasonic Transducer (CMUT) has been presented. The AFM measurements were carried out using the dynamic mode operation of an atomic force microscope to achieve higher resolution. The measurement results were used to construct the 3D deflection shape of the CMUT diaphragm with actual height parameters. The measured deflection shape of the CMUT diaphragm can be used to determine the stiffness, residual stress, and other physical parameters in a CMUT diaphragm to facilitate more accurate calibration and CMUT sensitivity.

Pages: 5 to 10

Copyright: Copyright (c) IARIA, 2020

Publication date: November 21, 2020

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-820-4

Location: Valencia, Spain

Dates: from November 21, 2020 to November 25, 2020