Home // SENSORDEVICES 2020, The Eleventh International Conference on Sensor Device Technologies and Applications // View article

Surface Acoustic Waves Sensors Based Lithium Niobate And Quartz For Particulates Matter Measurments

Authors:
Fatima-Ezzahraa Dbibih
Valérie Soumann
Jean-Marc Cote
Virginie Blondeau-Pâtissier

Keywords: PM2.5; PM10; SAW sensors; Lithium Niobate; Quartz

Abstract:
This abstract presents a comparison between three types of surface acoustic wave (SAW) sensors for measurement of particulate matter PM10 and PM2.5 and surface cleaning of sensors after saturation. The first SAW sensor is a Love wave device based on SiO2/AT-quartz cut substrate, the second one is a Rayleigh wave sensor based Lithium Niobate (LiNbO3) 128° YX LiNbO3 and the last one is a Pseudo wave sensor on SiO2/41° YX LiNbO3. The SAW sensors are used in combination with a 3 Lpm cascade impactor to classify particulates by size before being measured. The sensitivity was investigated using two type of aerosols PM2.5 and PM10 in the [0-200] µg/m3 concentration range. The sensors based on AT-Quartz show higher sensitivity for particulates matter measurements.

Pages: 40 to 41

Copyright: Copyright (c) IARIA, 2020

Publication date: November 21, 2020

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-820-4

Location: Valencia, Spain

Dates: from November 21, 2020 to November 25, 2020