Home // SENSORDEVICES 2021, The Twelfth International Conference on Sensor Device Technologies and Applications // View article
Authors:
Kevin Sanchez
Bilel Achour
Jérôme Riondet
Laurène Anglade
Miguel Carrera
Anthony Coustou
Aurélie Lecestre
Samuel Charlot
Hervé Aubert
Maylis Lavayssière
Alexandre Lefrançois
Jérôme Luc
Patrick Pons
Keywords: shockwave ; air blast ; pressure sensor
Abstract:
In several side-on configurations, the monitoring of blast wave requires sensor with very low response time (< 1 µs). The sensing area of commercial sensors are too high to fulfill this specification. New transducers are focused on miniature membrane (diameter < 100 µm), but with optical transduction which suffers from low integration capabilities for multiple transducers. In this communication, a miniature piezoresistive pressure transducer based on silicon membrane and silicon gauges is designed and fabricated. Shock tube characterizations of the sensor have shown promising dynamic behavior, with a rise time of 30 ns and a response time lower than 1 µs thanks to the membrane fundamental resonant frequency of 20 MHz. Undesirable mechanical effects leading to the response drift after 1 µs are discussed and interpreted as the result of the holder deformation.
Pages: 47 to 52
Copyright: Copyright (c) The Government of France, 2021. Used by permission to IARIA.
Publication date: November 14, 2021
Published in: conference
ISSN: 2308-3514
ISBN: 978-1-61208-918-8
Location: Athens, Greece
Dates: from November 14, 2021 to November 18, 2021