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Study on the Performance of Sensitive Part of Bridge Type Ultra-Thin Film Hydrogen Sensor

Authors:
Takahiro Mori
Shoki Wakabayashi
Kenji Kondoh
Takuya Takahashi
Makoto Nakagawa
Naohiro Ueda
Jin Wang
Kenji Sakai
Keiji Tsukada
Toshihiko Kiwa

Keywords: hydrogen sensor; ultra-thin film; platinum; bridge circuit

Abstract:
A large amount of CO2 emission of fossil fuels leads us to develop new clean energies, including solar, wind, and hydrogen energy. Especially, hydrogen energy is expected because hydrogen energy can be supplied stably. To develop more secure hydrogen gas supply and utilization technology, early detection of hydrogen gas leakage with high-sensitive hydrogen sensors is required. Recently, hydrogen sensors operating at room temperature, which can operate with low-energy consumption, have been developed. In our group, we have developed a Pt ultra-thin-film hydrogen sensor [1][2]. The electrical resistance changed by dissociation of hydrogen molecules on the surface of the film and injection of electrons into the film. In this study, the developed sensor was diagonally aligned as two components with different resistances which forms a Wheatstone bridge circuit fabricated on the Si substrates and the output voltage of the brigade circuit was measured. Because the resistivity changes by the environmental effect, such as temperature is canceled, so robust detection against the environmental change could be realized. The surface area dependence of the sensitives and the gas selectivity were also evaluated here. In addition, the effects of humidity on the hydrogen sensor were investigated.

Pages: 59 to 60

Copyright: Copyright (c) IARIA, 2021

Publication date: November 14, 2021

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-918-8

Location: Athens, Greece

Dates: from November 14, 2021 to November 18, 2021