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PdAu Based Resistive Hydrogen Sensor in Anaerobic Environment

Authors:
Clément Occelli
Tomas Fiorido
Carine Perrin-Pellegrino
Jean-Luc Seguin

Keywords: Hydrogen; PdAu; Resistive sensor; Anaerobic.

Abstract:
Hydrogen is a promising gas for greenhouse gas emission reduction but also a reactive one. Thus, sensor for hydrogen detection in various atmospheres is mandatory. While leak sensors in air environments have been widely studied, only few researches have been done for hydrogen detection in anaerobic environments. In this work, the electrical resistance variation of a PdAu alloy as a sensitive film, is studied at various temperatures for hydrogen exposures in an anaerobic (N2) environment. The Pd0.8Au0.2 alloy was deposited on a Si/SiO2 substrate using magnetron sputtering followed by annealing at 200°C in N2. The sensor was then tested at various temperatures for 0.3% H2 exposure, the best operating temperature was found to be 50°C. Finally, sensor was able to detect at 50°C, concentrations from 0.3 to 3% H2. These preliminary results are promising for further development of hydrogen sensors in anaerobic environment.

Pages: 77 to 81

Copyright: Copyright (c) IARIA, 2021

Publication date: November 14, 2021

Published in: conference

ISSN: 2308-3514

ISBN: 978-1-61208-918-8

Location: Athens, Greece

Dates: from November 14, 2021 to November 18, 2021