Home // SENSORDEVICES 2022, The Thirteenth International Conference on Sensor Device Technologies and Applications // View article
Authors:
Shoki Wakabayashi
Takahiro Mori
Jin Wang
Kenji Sakai
Toshihiko Kiwa
Keywords: sensor; ultra-thin film; twin-T; notch filter; platinum.
Abstract:
A twin-T type notch filter ultra-thin hydrogen sensor has been developed to improve and control the sensitivity of the sensors. The ultra-thin platinum films were used as resistors of a twin-T notch filter, so the frequency properties of the filter change when the resistivity of the films changes by hydrogen gas exposer. Therefore, the amplitude of output signals depends on the operation frequency of the sensor. The change in the output signal of the fabricated sensor for 1%-hydrogen gas exposure was 2.9% at 1.19 kHz and 4.3% at 0.99 kHz. This result indicates that the sensitivity of the sensor could be electrically controlled by changing the operating frequency of the sensor.
Pages: 1 to 2
Copyright: Copyright (c) IARIA, 2022
Publication date: October 16, 2022
Published in: conference
ISSN: 2308-3514
ISBN: 978-1-68558-006-3
Location: Lisbon, Portugal
Dates: from October 16, 2022 to October 20, 2022